Inventor

CONRADI OLAF

DE19 patents

⚠️ This page may combine multiple inventors who share the name “CONRADI OLAF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CONRADI OLAF

ZEISS CARL SMT GMBH

Projection objective of a microlithographic projection exposure apparatus

Method of operating a projection exposure tool for microlithography

Optical system and method of use

Projection exposure system and projection exposure method

Method of operating a projection exposure tool for microlithography

Microlithography projection objective

Optical system and method of use

Method for improving the imaging properties of a projection objective, and such a projection objective

Microlithography projection objective

Method for adjusting an illumination setting

Reflective optical element for EUV lithography and method of manufacturing a reflective optical element

ZEISS CARL SMT AG

Projection objective of a microlithographic projection exposure apparatus

Projection exposure apparatus and method for operating the same

Method for improving the imaging properties of a projection objective, and such a projection objective

CONRADI OLAF

Method for improving the imaging properties of a projection objective, and such a projection objective

Optical system and method of use

Method and system for correcting image changes

DODOC AURELIAN

Microlithographic projection exposure apparatus with correction optical system that heats projection objective element

BLEIDISTEL SASCHA

Semiconductor microlithography projection exposure apparatus