P

Inventor

MAEX KAREN

BE23 patents
⚠️ This page may combine multiple inventors who share the name “MAEX KAREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IMEC INTER UNI MICRO ELECTR

13 patents
US6391785B1May 21, 2002

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes

IMEC INTER UNI MICRO ELECTR584 citations98
US6664192B2Dec 16, 2003

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes

IMEC INTER UNI MICRO ELECTR77 citations97
US6720245B2Apr 13, 2004

Method of fabrication and device for electromagnetic-shielding structures in a damascene-based interconnect scheme

IMEC INTER UNI MICRO ELECTR57 citations92
US6635964B2Oct 21, 2003

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

IMEC INTER UNI MICRO ELECTR25 citations92
US6593251B2Jul 15, 2003

Method to produce a porous oxygen-silicon layer

IMEC INTER UNI MICRO ELECTR29 citations91
US6662631B2Dec 16, 2003

Method and apparatus for characterization of porous films

IMEC INTER UNI MICRO ELECTR34 citations90
US7037851B2May 2, 2006

Methods for selective integration of airgaps and devices made by such methods

IMEC INTER UNI MICRO ELECTR27 citations89
US7319274B2Jan 15, 2008

Methods for selective integration of airgaps and devices made by such methods

IMEC INTER UNI MICRO ELECTR30 citations88
US6495453B1Dec 17, 2002

Method for improving the quality of a metal layer deposited from a plating bath

IMEC INTER UNI MICRO ELECTR36 citations87
US6844266B2Jan 18, 2005

Anisotropic etching of organic-containing insulating layers

IMEC INTER UNI MICRO ELECTR15 citations80
US7016028B2Mar 21, 2006

Method and apparatus for defect detection

IMEC INTER UNI MICRO ELECTR9 citations72
US6319736B1Nov 20, 2001

Apparatus and method for determining porosity

IMEC INTER UNI MICRO ELECTR13 citations71
US6821884B2Nov 23, 2004

Method of fabricating a semiconductor device

IMEC INTER UNI MICRO ELECTR6 citations63

IMEC VZW

2 patents
US6245489B1Jun 12, 2001

Fluorinated hard mask for micropatterning of polymers

IMEC VZW26 citations90
US7042091B2May 9, 2006

Fluorinated hard mask for micropatterning of polymers

IMEC VZW7 citations71

INTERUNIVERSITAIR NIZROELECMIC

1 patent
US6852635B2Feb 8, 2005

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes

INTERUNIVERSITAIR NIZROELECMIC137 citations96

TEXAS INSTRUMENTS INC

1 patent
US7078352B2Jul 18, 2006

Methods for selective integration of airgaps and devices made by such methods

TEXAS INSTRUMENTS INC33 citations89

INTERUNIVERSITIAR MICROELEKTRO

1 patent
US6323555B1Nov 27, 2001

Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof

INTERUNIVERSITIAR MICROELEKTRO27 citations89

INTERUNIVERSITAIR MICROELECKTR

1 patent
US6435008B2Aug 20, 2002

Apparatus and method for determining porosity

INTERUNIVERSITAIR MICROELECKTR21 citations86

INTERNIVERSITAIR MICROELEKTRON

1 patent
US7124377B2Oct 17, 2006

Design method for essentially digital systems and components thereof and essentially digital systems made in accordance with the method

INTERNIVERSITAIR MICROELEKTRON20 citations79

APPLIED MATERIALS INC

1 patent
US6245653B1Jun 12, 2001

Method of filling an opening in an insulating layer

APPLIED MATERIALS INC3 citations59

IMEC

1 patent
US7790600B2Sep 7, 2010

Synthesis of zeolite crystals and formation of carbon nanostructures in patterned structures

IMEC5 citations56

ESCONJAUREGUI SANTIAGO CRUZ

1 patent
US8470709B2Jun 25, 2013

Formation of metal-containing nano-particles for use as catalysts for carbon nanotube synthesis

ESCONJAUREGUI SANTIAGO CRUZ0 citations37