Inventor

HAUKKA SUVI P

FI94 patents

⚠️ This page may combine multiple inventors who share the name “HAUKKA SUVI P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAUKKA SUVI P

ASM IP HOLDING BV

Si precursors for deposition of SiN at low temperatures

Dual selective deposition

Selective deposition of metals, metal oxides, and dielectrics

Sulfur-containing thin films

Deposition of organic films

Dual selective deposition

Deposition of organic films

Selective deposition

Selective deposition on metal or metallic surfaces relative to dielectric surfaces

Deposition of organic films

Deposition of organic films

Si precursors for deposition of SiN at low temperatures

Si precursors for deposition of SiN at low temperatures

Selective passivation and selective deposition

Selective deposition of metals, metal oxides, and dielectrics

Deposition of organic films

Selective deposition of metals, metal oxides, and dielectrics

Selective passivation and selective deposition

Sulfur-containing thin films

ASM INT

Selective formation of metallic films on metallic surfaces

Graded thin films

Method for depositing nanolaminate thin films on sensitive surfaces

Conformal thin films over textured capacitor electrodes

Deposition of transition metal carbides

Graded thin films

Protective layers prior to alternating layer deposition

Selective formation of metallic films on metallic surfaces

Thin films

Method of making conformal lining layers for damascene metallization

Method for controlling conformality with alternating layer deposition

Methods for making a dielectric stack in an integrated circuit

Method for depositing nanolaminate thin films on sensitive surfaces

Method for depositing nanolaminate thin films on sensitive surfaces

Method of forming ultrathin oxide layer

Conformal lining layers for damascene metallization

ASM MICROCHEMISTRY OY

Method of forming graded thin films using alternating pulses of vapor phase reactants

Method of forming ultrathin oxide layer

Deposition of transition metal carbides

Protective layers prior to alternating layer deposition

ASM INT NV

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

Selective formation of metallic films on metallic surfaces

IMEC INTER UNI MICRO ELECTR

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes

ASM INTERNAT NV

Conformal thin films over textured capacitor electrodes

ASM INTERNATIONAL NV

Methods for making a dielectric stack in an integrated circuit

PORE VILJAMI J

Metal silicide, metal germanide, methods for making the same

HAUKKA SUVI P

Selective formation of metallic films on metallic surfaces

INTERUNIVERSITAIR NIZROELECMIC

Method for bottomless deposition of barrier layers in integrated circuit metallization schemes