Inventor
HONG SUNG EUN
KR34 patents
⚠️ This page may combine multiple inventors who share the name “HONG SUNG EUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYUNDAI ELECTRONICS IND
16 patentsUS6489432B2Dec 3, 2002
Organic anti-reflective coating polymer and preparation thereof
HYUNDAI ELECTRONICS IND25 citations93
US6395397B2May 28, 2002
Organic anti-reflective coating polymer and preparation thereof
HYUNDAI ELECTRONICS IND23 citations92
US6388039B1May 14, 2002
Organic anti-reflective polymer and method for manufacturing thereof
HYUNDAI ELECTRONICS IND23 citations92
US6368768B1Apr 9, 2002
Organic anti-reflective coating material and its preparation
HYUNDAI ELECTRONICS IND26 citations92
US6350818B1Feb 26, 2002
Anti reflective coating polymers and the preparation method thereof
HYUNDAI ELECTRONICS IND16 citations92
US6309790B1Oct 30, 2001
Organic anti-reflective coating material and its preparation
HYUNDAI ELECTRONICS IND40 citations92
US6492441B2Dec 10, 2002
Anti reflective coating polymers and the preparation method thereof
HYUNDAI ELECTRONICS IND15 citations84
US6548613B2Apr 15, 2003
Organic anti-reflective coating polymer and preparation thereof
HYUNDAI ELECTRONICS IND8 citations74
US6489423B2Dec 3, 2002
Organic anti-reflective polymer and method for manufacturing thereof
HYUNDAI ELECTRONICS IND6 citations74
US6956091B2Oct 18, 2005
Organic anti-reflective polymer and preparation thereof
HYUNDAI ELECTRONICS IND2 citations63
US6780953B2Aug 24, 2004
Organic polymer for anti-reflective coating layer and preparation thereof
HYUNDAI ELECTRONICS IND3 citations63
US6770720B2Aug 3, 2004
Organic polymer for organic anti-reflective coating layer and preparation thereof
HYUNDAI ELECTRONICS IND3 citations63
US6699644B1Mar 2, 2004
Process for forming a photoresist pattern comprising alkaline treatment
HYUNDAI ELECTRONICS IND4 citations63
US6593446B1Jul 15, 2003
Organic polymer for organic anti-reflective coating layer and preparation thereof
HYUNDAI ELECTRONICS IND4 citations63
US6538090B2Mar 25, 2003
Organic anti-reflective polymer and method for manufacturing thereof
HYUNDAI ELECTRONICS IND2 citations63
US6423797B1Jul 23, 2002
Anti-reflective coating polymers from p-tosylmethylacrylamide and preparation method
HYUNDAI ELECTRONICS IND2 citations63
HYNIX SEMICONDUCTOR INC
12 patentsUS6984482B2Jan 10, 2006
Top-coating composition for photoresist and process for forming fine pattern using the same
HYNIX SEMICONDUCTOR INC6 citations74
US6664031B2Dec 16, 2003
Process for forming photoresist pattern by using gas phase amine treatment
HYNIX SEMICONDUCTOR INC7 citations74
US6486283B2Nov 26, 2002
Organic anti-reflective coating polymer, anti-reflective coating composition methods of preparation thereof
HYNIX SEMICONDUCTOR INC11 citations74
US7150961B2Dec 19, 2006
Additive for photoresist composition for resist flow process
HYNIX SEMICONDUCTOR INC4 citations63
US6797451B2Sep 28, 2004
Reflection-inhibiting resin used in process for forming photoresist pattern
HYNIX SEMICONDUCTOR INC5 citations63
US6770414B2Aug 3, 2004
Additive for photoresist composition for resist flow process
HYNIX SEMICONDUCTOR INC3 citations63
US6610616B2Aug 26, 2003
Method for forming micro-pattern of semiconductor device
HYNIX SEMICONDUCTOR INC5 citations63
US7329477B2Feb 12, 2008
Process for forming a fine pattern using a top-coating composition for a photoresist and product formed by same
HYNIX SEMICONDUCTOR INC1 citations52
US6602650B2Aug 5, 2003
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and methods of preparation thereof
HYNIX SEMICONDUCTOR INC0 citations52
US6599678B2Jul 29, 2003
Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and method of preparation thereof
HYNIX SEMICONDUCTOR INC1 citations52
US6582883B2Jun 24, 2003
Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof
HYNIX SEMICONDUCTOR INC0 citations52
US6562925B2May 13, 2003
Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof
HYNIX SEMICONDUCTOR INC0 citations52
AZ ELECTRONIC MATERIALS USA
4 patentsUS7745077B2Jun 29, 2010
Composition for coating over a photoresist pattern
AZ ELECTRONIC MATERIALS USA31 citations92
US7335464B2Feb 26, 2008
Water soluble resin composition, method of pattern formation and method of inspecting resist pattern
AZ ELECTRONIC MATERIALS USA12 citations84
US7745093B2Jun 29, 2010
Water soluble resin composition and method for pattern formation using the same
AZ ELECTRONIC MATERIALS USA14 citations81
US7799513B2Sep 21, 2010
Process for preventing development defect and composition for use in the same
AZ ELECTRONIC MATERIALS USA2 citations60