Inventor
GOLDBERG RICHARD DAVID
GB10 patents
⚠️ This page may combine multiple inventors who share the name “GOLDBERG RICHARD DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS6905947B2Jun 14, 2005
Monatomic boron ion source and method
APPLIED MATERIALS INC39 citations91
US6777882B2Aug 17, 2004
Ion beam generator
APPLIED MATERIALS INC38 citations90
US7087913B2Aug 8, 2006
Ion implanter electrodes
APPLIED MATERIALS INC19 citations88
US6847043B2Jan 25, 2005
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC21 citations88
US7518124B2Apr 14, 2009
Monatomic dopant ion source and method
APPLIED MATERIALS INC14 citations82
US7205552B2Apr 17, 2007
Monatomic boron ion source and method
APPLIED MATERIALS INC7 citations72
US7655924B2Feb 2, 2010
Front plate for an ion source
APPLIED MATERIALS INC7 citations71
US7586101B2Sep 8, 2009
Ion sources for ion implantation apparatus
APPLIED MATERIALS INC6 citations69