Inventor
CHUANG RAY
TW6 patents
Patents
6 patentsUS7030016B2Apr 18, 2006
Post ECP multi-step anneal/H2 treatment to reduce film impurity
TAIWAN SEMICONDUCTOR MFG22 citations92
US7432192B2Oct 7, 2008
Post ECP multi-step anneal/H2 treatment to reduce film impurity
TAIWAN SEMICONDUCTOR MFG11 citations83
US7183199B2Feb 27, 2007
Method of reducing the pattern effect in the CMP process
TAIWAN SEMICONDUCTOR MFG10 citations83
US7208404B2Apr 24, 2007
Method to reduce Rs pattern dependence effect
TAIWAN SEMICONDUCTOR MFG9 citations67
US7667835B2Feb 23, 2010
Apparatus and method for preventing copper peeling in ECP
TAIWAN SEMICONDUCTOR MFG0 citations51
US7102871B2Sep 5, 2006
Electrostatic chuck assembly having disassembling device
TAIWAN SEMICONDUCTOR MFG1 citations37