Inventor
SCHWAER BAERBEL
DE6 patents
⚠️ This page may combine multiple inventors who share the name “SCHWAER BAERBEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
3 patentsUS7830611B2Nov 9, 2010
Projection objective of a microlithographic projection exposure apparatus
ZEISS CARL SMT AG34 citations92
US7782440B2Aug 24, 2010
Projection lens system of a microlithographic projection exposure installation
ZEISS CARL SMT AG8 citations83
US7486382B2Feb 3, 2009
Imaging device in a projection exposure machine
ZEISS CARL SMT AG8 citations82