Inventor
LEV-AMI UZI
US8 patents
Patents
8 patentsUS7437204B2Oct 14, 2008
Method and apparatus for monitoring host to tool communications
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US7693687B2Apr 6, 2010
Controller and method to mediate data collection from smart sensors for fab applications
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US7146237B2Dec 5, 2006
Controller and method to mediate data collection from smart sensors for fab applications
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US6993404B2Jan 31, 2006
Graphical user interface with process quality indicator
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US7200671B1Apr 3, 2007
Method and apparatus for monitoring host to tool communications
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US7072985B1Jul 4, 2006
Method and apparatus for two phase structured message to tagged message translation
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US7725606B2May 25, 2010
Method and apparatus for two phase structured message to tagged message translation
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US7219255B2May 15, 2007
Failsafe switching of intelligent controller method and device
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