Inventor
TAYEBATI PAYAM
DE8 patents
⚠️ This page may combine multiple inventors who share the name “TAYEBATI PAYAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS7990622B2Aug 2, 2011
Projection objective of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH7 citations83
US8902401B2Dec 2, 2014
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH1 citations61
US8363206B2Jan 29, 2013
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH2 citations61
US9810996B2Nov 7, 2017
Optical imaging device with thermal attenuation
ZEISS CARL SMT GMBH0 citations50