Inventor
WINSLOW ARTHUR C
US11 patents
⚠️ This page may combine multiple inventors who share the name “WINSLOW ARTHUR C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS7176119B2Feb 13, 2007
Method of fabricating copper damascene and dual damascene interconnect wiring
IBM13 citations91
US6528219B1Mar 4, 2003
Dynamic alignment scheme for a photolithography system
IBM33 citations91
US5498313AMar 12, 1996
Symmetrical etching ring with gas control
IBM41 citations89
US6207333B1Mar 27, 2001
Mask with attenuating phase-shift and opaque regions
IBM48 citations88
US7153776B2Dec 26, 2006
Method for reducing amine based contaminants
IBM6 citations73
US7678683B2Mar 16, 2010
Method of fabricating copper damascene and dual damascene interconnect wiring
IBM3 citations61
US7803708B2Sep 28, 2010
Method for reducing amine based contaminants
IBM0 citations51
US8349728B2Jan 8, 2013
Method of fabricating copper damascene and dual damascene interconnect wiring
IBM0 citations50