Inventor
IWAI TETSUHIRO
JP23 patents
⚠️ This page may combine multiple inventors who share the name “IWAI TETSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD
9 patentsUS6784112B2Aug 31, 2004
Method for surface treatment of silicon based substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD81 citations98
US7056831B2Jun 6, 2006
Plasma processing apparatus and plasma processing method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD13 citations84
US6867146B2Mar 15, 2005
Plasma processing method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations74
US6340639B1Jan 22, 2002
Plasma process apparatus and plasma process method for substrate
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD11 citations74
US6921720B2Jul 26, 2005
Plasma treating apparatus and plasma treating method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD9 citations71
US7074720B2Jul 11, 2006
Plasma treating apparatus, plasma treating method and method of manufacturing semiconductor device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations63
US6723651B2Apr 20, 2004
Plasma processing method
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations63
US6468351B1Oct 22, 2002
Vacuum processing apparatus with improved maintainability
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD5 citations63
US6551444B2Apr 22, 2003
Plasma processing apparatus and method of processing
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations40
PANASONIC IP MAN CO LTD
6 patentsUS10796932B2Oct 6, 2020
Plasma processing apparatus
PANASONIC IP MAN CO LTD1 citations73
US11551943B2Jan 10, 2023
Plasma processing apparatus
PANASONIC IP MAN CO LTD0 citations62
US9842750B2Dec 12, 2017
Plasma processing method
PANASONIC IP MAN CO LTD1 citations62
US10734203B2Aug 4, 2020
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD0 citations41
US10672593B2Jun 2, 2020
Plasma processing apparatus and plasma processing method
PANASONIC IP MAN CO LTD0 citations41
US9786472B2Oct 10, 2017
Plasma processing apparatus and method for manufacturing electronic component
PANASONIC IP MAN CO LTD0 citations41
PANASONIC CORP
4 patentsUS7994026B2Aug 9, 2011
Plasma dicing apparatus and method of manufacturing semiconductor chips
PANASONIC CORP31 citations92
US9401286B2Jul 26, 2016
Plasma processing apparatus
PANASONIC CORP4 citations84
US7708860B2May 4, 2010
Plasma processing apparatus
PANASONIC CORP17 citations84
US9583355B2Feb 28, 2017
Plasma processing apparatus and plasma processing method
PANASONIC CORP3 citations71