Inventor
GANAPATHISUBRAMANIAN MAHADEVAN
US17 patents
⚠️ This page may combine multiple inventors who share the name “GANAPATHISUBRAMANIAN MAHADEVAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOLECULAR IMPRINTS INC
4 patentsUS7906058B2Mar 15, 2011
Bifurcated contact printing technique
MOLECULAR IMPRINTS INC19 citations92
US7803308B2Sep 28, 2010
Technique for separating a mold from solidified imprinting material
MOLECULAR IMPRINTS INC24 citations92
US7641840B2Jan 5, 2010
Method for expelling gas positioned between a substrate and a mold
MOLECULAR IMPRINTS INC22 citations92
US11020894B2Jun 1, 2021
Safe separation for nano imprinting
MOLECULAR IMPRINTS INC0 citations62
GANAPATHISUBRAMANIAN MAHADEVAN
4 patentsUS8215946B2Jul 10, 2012
Imprint lithography system and method
GANAPATHISUBRAMANIAN MAHADEVAN24 citations91
US8913230B2Dec 16, 2014
Chucking system with recessed support feature
GANAPATHISUBRAMANIAN MAHADEVAN4 citations71
US8237133B2Aug 7, 2012
Energy sources for curing in an imprint lithography system
GANAPATHISUBRAMANIAN MAHADEVAN6 citations71
US9164375B2Oct 20, 2015
Dual zone template chuck
GANAPATHISUBRAMANIAN MAHADEVAN3 citations61