Inventor
VREUGDENHIL EWOUD
NL7 patents
⚠️ This page may combine multiple inventors who share the name “VREUGDENHIL EWOUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS7897058B2Mar 1, 2011
Device manufacturing method and computer program product
ASML NETHERLANDS BV10 citations83
US7889316B2Feb 15, 2011
Method for patterning a radiation beam, patterning device for patterning a radiation beam
ASML NETHERLANDS BV0 citations50
US7507976B2Mar 24, 2009
Lithographic apparatus, beam delivery systems, prisms and device manufacturing method
ASML NETHERLANDS BV1 citations49
US8017310B2Sep 13, 2011
Lithographic method
ASML NETHERLANDS BV0 citations40
US7130023B2Oct 31, 2006
Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system
ASML NETHERLANDS BV0 citations39