Inventor
DE KLERK JOHANNES WILHELMUS
NL12 patents
⚠️ This page may combine multiple inventors who share the name “DE KLERK JOHANNES WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7511799B2Mar 31, 2009
Lithographic projection apparatus and a device manufacturing method
ASML NETHERLANDS BV179 citations98
US7724351B2May 25, 2010
Lithographic apparatus, device manufacturing method and exchangeable optical element
ASML NETHERLANDS BV12 citations89
US7580113B2Aug 25, 2009
Method of reducing a wave front aberration, and computer program product
ASML NETHERLANDS BV12 citations81
US7670731B2Mar 2, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV7 citations69
US7595863B2Sep 29, 2009
Lithographic apparatus, excimer laser and device manufacturing method
ASML NETHERLANDS BV5 citations69
US7732110B2Jun 8, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV1 citations61
US7655368B2Feb 2, 2010
Method for exposing a substrate and lithographic projection apparatus
ASML NETHERLANDS BV3 citations61
US7355674B2Apr 8, 2008
Lithographic apparatus, device manufacturing method and computer program product
ASML NETHERLANDS BV4 citations61
US7889316B2Feb 15, 2011
Method for patterning a radiation beam, patterning device for patterning a radiation beam
ASML NETHERLANDS BV0 citations50