Inventor
KOK MARTINUS JOSEPH
NL7 patents
⚠️ This page may combine multiple inventors who share the name “KOK MARTINUS JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS7659988B2Feb 9, 2010
Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method
ASML NETHERLANDS BV7 citations71
US7999940B2Aug 16, 2011
Apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV2 citations58
US7999943B2Aug 16, 2011
Device manufacturing method with angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations48
US10101677B2Oct 16, 2018
Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices
ASML NETHERLANDS BV1 citations46
SEIJGER OLAV JOHANNES
3 patentsUS8797509B2Aug 5, 2014
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
SEIJGER OLAV JOHANNES0 citations44
US8773640B2Jul 8, 2014
Inspection method and apparatus
SEIJGER OLAV JOHANNES1 citations44
US8922755B2Dec 30, 2014
Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates
SEIJGER OLAV JOHANNES0 citations34