Inventor
SAKAI KAZUFUMI
JP2 patents
Patents
2 patentsUS8599379B2Dec 3, 2013
Method for inspecting defects and defect inspecting apparatus
SAKAI KAZUFUMI7 citations77
US9019498B2Apr 28, 2015
Method for inspecting defects, inspected wafer or semiconductor device manufactured using the same, method for quality control of wafers or semiconductor devices and defect inspecting apparatus
SAKAI KAZUFUMI5 citations67