Inventor

HOOSHDARAN FRANK F

US2 patents

⚠️ This page may combine multiple inventors who share the name “HOOSHDARAN FRANK F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YANG YAO-HUNG

1 patent

US9089007B2Jul 21, 2015

Method and apparatus for substrate support with multi-zone heating

YANG YAO-HUNG10 citations80

APPLIED MATERIALS INC

1 patent

US8911151B2Dec 16, 2014

Substrate support bushing

APPLIED MATERIALS INC0 citations47