Inventor
BHESETTI SIVA SURI CHANDRA RAO
SG3 patents
Patents
3 patentsUS11053590B2Jul 6, 2021
Nozzle for uniform plasma processing
APPLIED MATERIALS INC3 citations70
US10465288B2Nov 5, 2019
Nozzle for uniform plasma processing
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US9390964B2Jul 12, 2016
Methods for fabricating dual damascene structures in low temperature dielectric materials
APPLIED MATERIALS INC2 citations50