P

Inventor

ISHIHARA SHIGENORI

JP14 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA SHIGENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON ANELVA CORP

6 patents
US9627187B2Apr 18, 2017

Sputtering apparatus

CANON ANELVA CORP6 citations71
US10062551B2Aug 28, 2018

Sputtering apparatus and substrate processing apparatus

CANON ANELVA CORP2 citations69
US9997339B2Jun 12, 2018

Sputtering apparatus and substrate processing apparatus

CANON ANELVA CORP2 citations69
US9502223B2Nov 22, 2016

Sputtering apparatus, target and shield

CANON ANELVA CORP1 citations50
US10615012B2Apr 7, 2020

Sputtering apparatus and substrate processing apparatus

CANON ANELVA CORP0 citations48
US9966241B2May 8, 2018

Sputtering apparatus

CANON ANELVA CORP0 citations40

HOYA CORP

5 patents
US9952498B2Apr 24, 2018

Mask blank, and transfer mask

HOYA CORP0 citations51
US9470970B2Oct 18, 2016

Mask blank, transfer mask, and methods of manufacturing the same

HOYA CORP0 citations51
US7601468B2Oct 13, 2009

Process for manufacturing half-tone phase shifting mask blanks

HOYA CORP0 citations51
US7141339B2Nov 28, 2006

Process for manufacturing half-tone phase shifting mask blanks

HOYA CORP1 citations51
US7026077B2Apr 11, 2006

Photomask blank manufacturing method

HOYA CORP1 citations51

MINAMI TAKASHI

1 patent
US8298627B2Oct 30, 2012

Method and apparatus of plasma treatment

MINAMI TAKASHI186 citations96

CANON KK

1 patent
US7579287B2Aug 25, 2009

Surface treatment method, manufacturing method of semiconductor device, and manufacturing method of capacitive element

CANON KK10 citations82

ISHIHARA SHIGENORI

1 patent
US9175377B2Nov 3, 2015

Film forming apparatus and film forming method

ISHIHARA SHIGENORI4 citations66