Inventor
DICKINSON COLIN JOHN
US22 patents
⚠️ This page may combine multiple inventors who share the name “DICKINSON COLIN JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS9240308B2Jan 19, 2016
Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
APPLIED MATERIALS INC17 citations92
US9867238B2Jan 9, 2018
Apparatus for treating an exhaust gas in a foreline
APPLIED MATERIALS INC7 citations84
US10685818B2Jun 16, 2020
Plasma abatement technology utilizing water vapor and oxygen reagent
APPLIED MATERIALS INC6 citations83
US9597634B2Mar 21, 2017
Methods and apparatus for treating exhaust gas in a processing system
APPLIED MATERIALS INC9 citations83
US9552967B2Jan 24, 2017
Abatement system having a plasma source
APPLIED MATERIALS INC7 citations83
US9230780B2Jan 5, 2016
Hall effect enhanced capacitively coupled plasma source
APPLIED MATERIALS INC14 citations83
US9649592B2May 16, 2017
Plasma abatement of compounds containing heavy atoms
APPLIED MATERIALS INC11 citations82
US10115571B2Oct 30, 2018
Reagent delivery system freeze prevention heat exchanger
APPLIED MATERIALS INC5 citations72
US9543124B2Jan 10, 2017
Capacitively coupled plasma source for abating compounds produced in semiconductor processes
APPLIED MATERIALS INC4 citations72
US11185815B2Nov 30, 2021
Plasma abatement of compounds containing heavy atoms
APPLIED MATERIALS INC1 citations71
US10449486B2Oct 22, 2019
Plasma abatement of compounds containing heavy atoms
APPLIED MATERIALS INC1 citations71
US12170192B2Dec 17, 2024
Plasma abatement system utilizing water vapor and oxygen reagent
APPLIED MATERIALS INC0 citations62
US11110392B2Sep 7, 2021
Apparatus for treating exhaust gas in a processing system
APPLIED MATERIALS INC0 citations62
US10920315B2Feb 16, 2021
Plasma foreline thermal reactor system
APPLIED MATERIALS INC1 citations62
US10625312B2Apr 21, 2020
Plasma abatement solids avoidance by use of oxygen plasma cleaning cycle
APPLIED MATERIALS INC1 citations62
US10722840B2Jul 28, 2020
Methods for treating exhaust gas in a processing system
APPLIED MATERIALS INC0 citations51
US10176973B2Jan 8, 2019
Method of cooling a composition using a hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
APPLIED MATERIALS INC0 citations51
US12183559B2Dec 31, 2024
Apparatus for temperature control in a substrate processing chamber
APPLIED MATERIALS INC0 citations49