Inventor
MOALEM MEHRAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “MOALEM MEHRAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6367412B1Apr 9, 2002
Porous ceramic liner for a plasma source
APPLIED MATERIALS INC135 citations97
US6468490B1Oct 22, 2002
Abatement of fluorine gas from effluent
APPLIED MATERIALS INC78 citations95
US9597634B2Mar 21, 2017
Methods and apparatus for treating exhaust gas in a processing system
APPLIED MATERIALS INC9 citations83
US11110392B2Sep 7, 2021
Apparatus for treating exhaust gas in a processing system
APPLIED MATERIALS INC0 citations62
US12469751B2Nov 11, 2025
Apparatus to detect and quantify radical concentration in semiconductor processing systems
APPLIED MATERIALS INC0 citations61
US12567561B2Mar 3, 2026
High-power density RF remote plasma source apparatus
APPLIED MATERIALS INC0 citations51
US10722840B2Jul 28, 2020
Methods for treating exhaust gas in a processing system
APPLIED MATERIALS INC0 citations51