Inventor
NAMBA KUNITOSHI
JP27 patents
⚠️ This page may combine multiple inventors who share the name “NAMBA KUNITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM IP HOLDING BV
13 patentsUS9607837B1Mar 28, 2017
Method for forming silicon oxide cap layer for solid state diffusion process
ASM IP HOLDING BV473 citations99
US9464352B2Oct 11, 2016
Low-oxidation plasma-assisted process
ASM IP HOLDING BV463 citations99
US10014212B2Jul 3, 2018
Selective deposition of metallic films
ASM IP HOLDING BV397 citations98
US10480064B2Nov 19, 2019
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV47 citations97
US10041166B2Aug 7, 2018
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV57 citations97
US9805974B1Oct 31, 2017
Selective deposition of metallic films
ASM IP HOLDING BV66 citations97
US9803277B1Oct 31, 2017
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV87 citations97
US9899291B2Feb 20, 2018
Method for protecting layer by forming hydrocarbon-based extremely thin film
ASM IP HOLDING BV463 citations95
US10793946B1Oct 6, 2020
Reaction chamber passivation and selective deposition of metallic films
ASM IP HOLDING BV17 citations94
US10410857B2Sep 10, 2019
Formation of SiN thin films
ASM IP HOLDING BV13 citations84
US9576790B2Feb 21, 2017
Deposition of boron and carbon containing materials
ASM IP HOLDING BV7 citations84
US11784043B2Oct 10, 2023
Formation of SiN thin films
ASM IP HOLDING BV1 citations73
US11133181B2Sep 28, 2021
Formation of SiN thin films
ASM IP HOLDING BV3 citations73
ASM INT NV
6 patentsUS10147600B2Dec 4, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV417 citations99
US9875893B2Jan 23, 2018
Methods for forming doped silicon oxide thin films
ASM INT NV419 citations99
US9564314B2Feb 7, 2017
Methods for forming doped silicon oxide thin films
ASM INT NV465 citations99
US10510530B2Dec 17, 2019
Methods for forming doped silicon oxide thin films
ASM INT NV3 citations84
US11302527B2Apr 12, 2022
Methods for forming doped silicon oxide thin films
ASM INT NV1 citations73
US10784105B2Sep 22, 2020
Methods for forming doped silicon oxide thin films
ASM INT NV2 citations73