Inventor
TORIKAWA SHOTA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TORIKAWA SHOTA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH SCIENCE CORP
6 patentsUS10971330B2Apr 6, 2021
Automatic processing device
HITACHI HIGH TECH SCIENCE CORP7 citations79
US9336987B2May 10, 2016
Charged particle beam apparatus
HITACHI HIGH TECH SCIENCE CORP2 citations61
US10622187B2Apr 14, 2020
Charged particle beam apparatus and sample processing observation method
HITACHI HIGH TECH SCIENCE CORP0 citations51
US9218939B2Dec 22, 2015
Focused ion beam system, sample processing method using the same, and sample processing program using focused ion beam
HITACHI HIGH TECH SCIENCE CORP0 citations50
US10648081B2May 12, 2020
Method of burying sample trench
HITACHI HIGH TECH SCIENCE CORP0 citations47
US9190243B2Nov 17, 2015
Composite charged particle beam apparatus and thin sample processing method
HITACHI HIGH TECH SCIENCE CORP0 citations40