Inventor
YEH CHAO-KUEI
TW4 patents
Patents
4 patentsUS10340141B2Jul 2, 2019
Patterning method for semiconductor device and structures resulting therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations71
US10636667B2Apr 28, 2020
Method for manufacturing semiconductor devices and structures thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US10276378B1Apr 30, 2019
Method of forming funnel-like opening for semiconductor device structure
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations69
US11183392B2Nov 23, 2021
Method for manufacturing semiconductor devices and structures thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59