Inventor
VAN DER LANS MARCUS JOHANNES
NL3 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER LANS MARCUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TNO
2 patentsUS11035878B2Jun 15, 2021
Atomic force microscopy system, method for mapping one or more subsurface structures located in a semiconductor device or for monitoring lithographic parameters in a semiconductor device and use of such an atomic force microscopy system
TNO0 citations48
US11635448B2Apr 25, 2023
Heterodyne scanning probe microscopy method and scanning probe microscopy system
TNO0 citations44