Inventor
SOTOKU KOTA
JP6 patents
Patents
6 patentsUS11036142B2Jun 15, 2021
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations56
US10049900B2Aug 14, 2018
Substrate treatment method
SCREEN HOLDINGS CO LTD0 citations50
US9768040B2Sep 19, 2017
Substrate treatment method
SCREEN HOLDINGS CO LTD1 citations50
US11342162B2May 24, 2022
Resist removing method and resist removing apparatus
SCREEN HOLDINGS CO LTD0 citations48
US10639665B2May 5, 2020
Substrate processing apparatus and standby method for ejection head
SCREEN HOLDINGS CO LTD0 citations38
US10748795B2Aug 18, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations36