Inventor
YASHIKI HIROYUKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YASHIKI HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
3 patentsUS7935217B2May 3, 2011
Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate
DAINIPPON SCREEN MFG37 citations89
US7547181B2Jun 16, 2009
Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum
DAINIPPON SCREEN MFG19 citations82
US9721814B2Aug 1, 2017
Substrate processing apparatus
DAINIPPON SCREEN MFG2 citations71
SCREEN HOLDINGS CO LTD
3 patentsUS12442066B2Oct 14, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations49
US10586693B2Mar 10, 2020
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations40
US10639665B2May 5, 2020
Substrate processing apparatus and standby method for ejection head
SCREEN HOLDINGS CO LTD0 citations38