Inventor
ZI AN-REN
TW67 patents
Patents
50 patentsUS10073347B1Sep 11, 2018
Semiconductor method of protecting wafer from bevel contamination
TAIWAN SEMICONDUCTOR MFG CO LTD19 citations94
US11300878B2Apr 12, 2022
Photoresist developer and method of developing photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations86
US11054742B2Jul 6, 2021
EUV metallic resist performance enhancement via additives
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10866511B2Dec 15, 2020
Extreme ultraviolet photolithography method with developer composition
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10381481B1Aug 13, 2019
Multi-layer photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US12253800B2Mar 18, 2025
EUV metallic resist performance enhancement via additives
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations75
US12249507B2Mar 11, 2025
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US12222650B2Feb 11, 2025
Photoresist underlayer and method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations75
US11971657B2Apr 30, 2024
Photoresist developer and method of developing photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11822238B2Nov 21, 2023
Extreme ultraviolet photolithography method with developer composition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11681221B2Jun 20, 2023
EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11681226B2Jun 20, 2023
Metal-compound-removing solvent and method in lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11605538B2Mar 14, 2023
Protective composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11456170B2Sep 27, 2022
Cleaning solution and method of cleaning wafer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11269256B2Mar 8, 2022
Underlayer material for photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11029602B2Jun 8, 2021
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US11016386B2May 25, 2021
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10866516B2Dec 15, 2020
Metal-compound-removing solvent and method in lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10741410B2Aug 11, 2020
Material composition and methods thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10698317B2Jun 30, 2020
Underlayer material for photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10622211B2Apr 14, 2020
Metal-compound-removing solvent and method in lithography
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10503070B2Dec 10, 2019
Photosensitive material and method of lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10274847B2Apr 30, 2019
Humidity control in EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12550685B2Feb 10, 2026
Protective composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12532687B2Jan 20, 2026
Cleaning solution and method of cleaning wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12500084B2Dec 16, 2025
Semiconductor manufacturing apparatus and method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12469692B2Nov 11, 2025
Cleaning solution and method of cleaning wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12436458B2Oct 7, 2025
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12360456B2Jul 15, 2025
EUV metallic resist performance enhancement via additives
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12210286B2Jan 28, 2025
Metal-compound-removing solvent and method in lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12210283B2Jan 28, 2025
EUV photoresist with low-activation-energy ligands or high-developer-solubility ligands
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12181798B2Dec 31, 2024
Extreme ultraviolet photolithography method with developer composition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12174540B2Dec 24, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12050404B2Jul 30, 2024
Photoresist with polar-acid-labile-group
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12009210B2Jun 11, 2024
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11934101B2Mar 19, 2024
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11822251B2Nov 21, 2023
Photoresist with polar-acid-labile-group
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11762296B2Sep 19, 2023
Method and apparatus of patterning a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11626285B2Apr 11, 2023
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11495460B2Nov 8, 2022
Method for forming semiconductor structure by patterning resist layer having inorganic material
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11460776B2Oct 4, 2022
Method and apparatus of patterning a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11307504B2Apr 19, 2022
Humidity control in EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11287740B2Mar 29, 2022
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US11215924B2Jan 4, 2022
Photoresist, developer, and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US11137685B2Oct 5, 2021
Semiconductor method of protecting wafer from bevel contamination
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11036137B2Jun 15, 2021
Method for forming semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US10990013B2Apr 27, 2021
Method for forming semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US10741391B2Aug 11, 2020
Method for forming semiconductor structure by patterning resist layer having inorganic material
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12487527B2Dec 2, 2025
Photoresist developer and method of developing photoresist
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12354874B2Jul 8, 2025
Method of manufacturing semiconductor devices and pattern formation method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
Showing the top 50 of 67 patents by PatentIndex Score.