Inventor
YANG CHIH-SHEN
TW11 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHIH-SHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11414757B2Aug 16, 2022
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations82
US12378668B2Aug 5, 2025
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12037687B2Jul 16, 2024
Gas tube, gas supply system and manufacturing method of semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11854841B2Dec 26, 2023
Space filling device for wet bench
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11482430B2Oct 25, 2022
Space filling device for wet bench
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11075104B2Jul 27, 2021
Semiconductor chuck and method of making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11270950B2Mar 8, 2022
Apparatus and method for forming alignment marks
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10964559B2Mar 30, 2021
Wafer etching apparatus and method for controlling etch bath of wafer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12374530B2Jul 29, 2025
Semiconductor processing apparatus for generating plasma
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46