Inventor
Pieper Hans Hermann
DE6 patents
Patents
6 patentsUS11429020B2Aug 30, 2022
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH1 citations70
US9995764B2Jun 12, 2018
Method and apparatus for avoiding damage when analysing a sample surface with a scanning probe microscope
ZEISS CARL SMT GMBH2 citations66
US12517426B2Jan 6, 2026
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH0 citations60
US11899359B2Feb 13, 2024
Method and apparatus for removing a particle from a photolithographic mask
ZEISS CARL SMT GMBH0 citations60
US11977097B2May 7, 2024
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59
US11353478B2Jun 7, 2022
Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope
ZEISS CARL SMT GMBH0 citations59