Inventor
SON HYOUNGKYU
KR3 patents
Patents
3 patentsUS12456606B2Oct 28, 2025
Support unit and apparatus for treating substrate
SEMES CO LTD0 citations58
US12249491B2Mar 11, 2025
Substrate treating apparatus and substrate support unit
SEMES CO LTD0 citations47
US11915905B2Feb 27, 2024
Support unit and substrate treating apparatus including the same
SEMES CO LTD0 citations38