Inventor
CHANG XUE
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHANG XUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS11551965B2Jan 10, 2023
Apparatus to reduce polymers deposition
APPLIED MATERIALS INC0 citations61
US12562353B2Feb 24, 2026
Replaceable electrostatic chuck outer ring for edge arcing mitigation
APPLIED MATERIALS INC0 citations60
US11211282B2Dec 28, 2021
Apparatus to reduce contamination in a plasma etching chamber
APPLIED MATERIALS INC1 citations60
US11835146B2Dec 5, 2023
Symmetric flow valve for flow conductance control
APPLIED MATERIALS INC0 citations55
US11199267B2Dec 14, 2021
Symmetric flow valve for higher flow conductance
APPLIED MATERIALS INC1 citations55
US12183605B2Dec 31, 2024
In-situ semiconductor processing chamber temperature apparatus
APPLIED MATERIALS INC0 citations47