Inventor

HU KESONG

US3 patents

Patents

3 patents

US11501993B2Nov 15, 2022

Semiconductor substrate supports with improved high temperature chucking

APPLIED MATERIALS INC2 citations71

US12195846B2Jan 14, 2025

Modified stacks for 3D NAND

APPLIED MATERIALS INC0 citations45

US11946140B2Apr 2, 2024

Hot showerhead

APPLIED MATERIALS INC0 citations43