Inventor
OGATA MASAKI
US21 patents
⚠️ This page may combine multiple inventors who share the name “OGATA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS9157730B2Oct 13, 2015
PECVD process
APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017
PECVD process
APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016
PECVD process
APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020
PECVD process
APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018
PECVD process
APPLIED MATERIALS INC3 citations84
US11613812B2Mar 28, 2023
PECVD process
APPLIED MATERIALS INC2 citations73
US10276353B2Apr 30, 2019
Dual-channel showerhead for formation of film stacks
APPLIED MATERIALS INC4 citations71
US11530482B2Dec 20, 2022
Faceplate having a curved surface
APPLIED MATERIALS INC1 citations70
US11339475B2May 24, 2022
Film stack overlay improvement
APPLIED MATERIALS INC2 citations70
US11898249B2Feb 13, 2024
PECVD process
APPLIED MATERIALS INC0 citations62
US10030306B2Jul 24, 2018
PECVD apparatus and process
APPLIED MATERIALS INC1 citations62
US12110590B2Oct 8, 2024
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US11851759B2Dec 26, 2023
Faceplate having a curved surface
APPLIED MATERIALS INC0 citations60
US11276569B2Mar 15, 2022
On stack overlay improvement for 3D NAND
APPLIED MATERIALS INC0 citations51
US12195846B2Jan 14, 2025
Modified stacks for 3D NAND
APPLIED MATERIALS INC0 citations45
US10790140B2Sep 29, 2020
High deposition rate and high quality nitride
APPLIED MATERIALS INC0 citations41