Inventor
YANG CHUANXI
US7 patents
Patents
7 patentsUS11538677B2Dec 27, 2022
Systems and methods for depositing high density and high tensile stress films
APPLIED MATERIALS INC0 citations60
US11515145B2Nov 29, 2022
Deposition of silicon boron nitride films
APPLIED MATERIALS INC0 citations60
US12451345B2Oct 21, 2025
PECVD of SiBN thin films with low leakage current
APPLIED MATERIALS INC0 citations59
US11935751B2Mar 19, 2024
Boron nitride for mask patterning
APPLIED MATERIALS INC0 citations59
US12564022B2Feb 24, 2026
Carbon hardmask opening using boron nitride mask
APPLIED MATERIALS INC0 citations58
US12543521B2Feb 3, 2026
Methods of forming memory device with reduced resistivity
APPLIED MATERIALS INC0 citations56
US12195846B2Jan 14, 2025
Modified stacks for 3D NAND
APPLIED MATERIALS INC0 citations45