Inventor
TIAN SIYUAN
US16 patents
⚠️ This page may combine multiple inventors who share the name “TIAN SIYUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS11430688B2Aug 30, 2022
Two-stage pin lifter for de-chuck operations
LAM RES CORP6 citations73
US12077862B2Sep 3, 2024
Connector for substrate support with embedded temperature sensors
LAM RES CORP0 citations61
US12154814B2Nov 26, 2024
Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array
LAM RES CORP0 citations60
US11869794B2Jan 9, 2024
Long-life extended temperature range embedded diode design for electrostatic chuck with multiplexed heaters array
LAM RES CORP1 citations60
US10957520B2Mar 23, 2021
Long-life high-power terminals for substrate support with embedded heating elements
LAM RES CORP0 citations60
US10522377B2Dec 31, 2019
System and method for substrate support feed-forward temperature control based on RF power
LAM RES CORP1 citations58
US11791189B2Oct 17, 2023
Reflectometer to monitor substrate movement
LAM RES CORP0 citations56
US12308265B2May 20, 2025
RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system
LAM RES CORP0 citations51
US10851458B2Dec 1, 2020
Connector for substrate support with embedded temperature sensors
LAM RES CORP0 citations51
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI
6 patentsUS11323007B2May 3, 2022
Magnetic levitation bearing, magnetic levitation rotor support assembly, and compressor
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI1 citations61
US10690184B2Jun 23, 2020
Axial magnetic bearing having a protective device
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI0 citations50
US11174898B2Nov 16, 2021
Wiring structure of magnetic suspension bearing, compressor and air conditioner
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI0 citations49
US10767692B2Sep 8, 2020
Magnetic levitation bearing assembly and compressor
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI0 citations39
US10746223B2Aug 18, 2020
Protective structure for magnetic bearing and magnetic bearing assembly
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI0 citations39
US10851835B2Dec 1, 2020
Stator assembly of a magnetic suspension bearing and manufacturing method
GREE GREEN REFRIGERATION TECH CT CO LTD ZHUHAI0 citations38