Inventor
JING CHANGYOU
US9 patents
Patents
9 patentsUS11823875B2Nov 21, 2023
Real-time control of temperature in a plasma chamber
LAM RES CORP2 citations69
US11087962B2Aug 10, 2021
Real-time control of temperature in a plasma chamber
LAM RES CORP2 citations69
US12518952B2Jan 6, 2026
Real-time control of temperature in a plasma chamber
LAM RES CORP0 citations59
US12165891B2Dec 10, 2024
Identification of and compensation for a failure in a heater array
LAM RES CORP0 citations59
US10306776B1May 28, 2019
Substrate processing system printed-circuit control board assembly with one or more heater layers
LAM RES CORP1 citations59
US12444570B2Oct 14, 2025
Electrostatic chuck heater resistance measurement to approximate temperature
LAM RES CORP0 citations56
US12308265B2May 20, 2025
RF immune sensor probe for monitoring a temperature of an electrostatic chuck of a substrate processing system
LAM RES CORP0 citations51
US12142464B2Nov 12, 2024
In situ real-time sensing and compensation of non-uniformities in substrate processing systems
LAM RES CORP0 citations45
US11901944B2Feb 13, 2024
Power and data transmission to substrate support in plasma chambers via optical fiber
LAM RES CORP0 citations43