Inventor

PARK JIN SE

KR4 patents

Patents

4 patents

US11862491B2Jan 2, 2024

Apparatus and method for treating substrate

SEMES CO LTD0 citations55

US12057335B2Aug 6, 2024

Apparatus for treating substrate and apparatus for measuring concentration

SEMES CO LTD0 citations48

US12546534B2Feb 10, 2026

Substrate treating apparatus

SEMES CO LTD0 citations47

US12480595B2Nov 25, 2025

Anti freeze valve apparatus and semiconductor processing device including the same and manufacturing method thereof

SEMES CO LTD0 citations45