Inventor

HOSOKAWA NAOKICHI

4 patents

⚠️ This page may combine multiple inventors who share the name “HOSOKAWA NAOKICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

3 patents

US5458759AOct 17, 1995

Magnetron sputtering cathode apparatus

ANELVA CORP61 citations94

US5382344AJan 17, 1995

Sputtering apparatus

ANELVA CORP68 citations91

US4604180AAug 5, 1986

Target assembly capable of attaining a high step coverage ratio in a magnetron-type sputtering device

ANELVA CORP59 citations90

NIPPON ELECTRIC VARIAN LTD

1 patent

US3984301AOct 5, 1976

Sputter-etching method employing fluorohalogenohydrocarbon etching gas and a planar electrode for a glow discharge

NIPPON ELECTRIC VARIAN LTD34 citations82