Inventor
MASE MASAHIRO
JP13 patents
Patents
13 patentsUS5961291AOct 5, 1999
Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump
HITACHI LTD128 citations96
US5062771ANov 5, 1991
Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber
HITACHI LTD48 citations93
US4734018AMar 29, 1988
Vacuum pump with plural labyrinth seal portions
HITACHI LTD38 citations92
US5664935ASep 9, 1997
Vacuum pump
HITACHI LTD20 citations91
US5536148AJul 16, 1996
Turbo vacuum pump
HITACHI LTD28 citations91
US5190438AMar 2, 1993
Vacuum pump
HITACHI LTD26 citations91
US5020969AJun 4, 1991
Turbo vacuum pump
HITACHI LTD55 citations91
US4904155AFeb 27, 1990
Vacuum pump
HITACHI LTD32 citations90
US4835114AMay 30, 1989
Method for LPCVD of semiconductors using oil free vacuum pumps
HITACHI LTD36 citations90
US4668160AMay 26, 1987
Vacuum pump
HITACHI LTD38 citations90
US4593835AJun 10, 1986
Cryogenic liquefied pump system
HITACHI LTD33 citations89
US5451147ASep 19, 1995
Turbo vacuum pump
HITACHI LTD16 citations73
US4735550AApr 5, 1988
Turbo molecular pump
HITACHI LTD13 citations72