Inventor
UEKI KAZUYOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “UEKI KAZUYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS4289188ASep 15, 1981
Method and apparatus for monitoring etching
HITACHI LTD60 citations95
US4412119AOct 25, 1983
Method for dry-etching
HITACHI LTD32 citations92
US4267013AMay 12, 1981
Method for dry-etching aluminum and aluminum alloys
HITACHI LTD48 citations89
US4308089ADec 29, 1981
Method for preventing corrosion of Al and Al alloys
HITACHI LTD27 citations80