Inventor

MIMURA YOSHIKI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “MIMURA YOSHIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MIMURA YOSHIKI

USHIO ELECTRIC INC

Heating method of semiconductor wafer

Flashlight-radiant apparatus

Method for heating semiconductor wafers by a light-radiant heating furnace

Heat treatment device of the light irradiation type and heat treatment process of the irradiation type

Process for exposing a peripheral area of a wafer and a device for executing the process

Heater assembly and a heat-treatment method of semiconductor wafer using the same

Heating method of semiconductor wafer

Light-radiant heating furnace

Method for heating semiconductor wafer by means of application of radiated light with supplemental circumferential heating

Device for exposing the peripheral area of a wafer

Process for exposing the peripheral area of a semiconductor wafer for removing unnecessary resist on the semiconductor wafer and a device for executing the process

Apparatus for curing resist

Uniform wafer heating by controlling light source and circumferential heating of wafer

Heat treatment device of the light irradiation type

Apparatus for treating photoresists

Process for determination of blackening of a lamp

Method of treating photoresists

Method of treating photoresists

Device for exposure of a peripheral area of a film circuit board

USHO DENKI

Method of treating photoresists