Inventor
SAKATA KAZUNARI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “SAKATA KAZUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS5556275ASep 17, 1996
Heat treatment apparatus
TOKYO ELECTRON LTD389 citations97
US5447294ASep 5, 1995
Vertical type heat treatment system
TOKYO ELECTRON LTD493 citations97
US6729823B2May 4, 2004
Processing system for object to be processed
TOKYO ELECTRON LTD26 citations92
US5219464AJun 15, 1993
Clean air apparatus
TOKYO ELECTRON LTD37 citations92
US7059849B2Jun 13, 2006
Heat treatment system and a method for cooling a loading chamber
TOKYO ELECTRON LTD19 citations89
US7819658B2Oct 26, 2010
Heat treatment system and method therefore
TOKYO ELECTRON LTD9 citations83
US5951282ASep 14, 1999
Vertical heat treatment apparatus
TOKYO ELECTRON LTD17 citations82
US10679878B2Jun 9, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD5 citations73
US6042372AMar 28, 2000
Heat treatment apparatus
TOKYO ELECTRON LTD15 citations72
TEL SAGAMI LTD
4 patentsUS5261167ANov 16, 1993
Vertical heat treating apparatus
TEL SAGAMI LTD362 citations98
US5181819AJan 26, 1993
Apparatus for processing semiconductors
TEL SAGAMI LTD63 citations96
US5261935ANov 16, 1993
Clean air apparatus
TEL SAGAMI LTD112 citations95
US5226812AJul 13, 1993
Vertical type heat-treating apparatus
TEL SAGAMI LTD14 citations73