Inventor

ILLSLEY ROLF F

US2 patents

Patents

2 patents

US5618388AApr 8, 1997

Geometries and configurations for magnetron sputtering apparatus

OPTICAL COATING LABORATORY INC165 citations96

US5879519AMar 9, 1999

Geometries and configurations for magnetron sputtering apparatus

OPTICAL COATING LABORATORY INC105 citations95