Inventor
HASHINOKI KENJI
JP13 patents
Patents
13 patentsUS7069099B2Jun 27, 2006
Method of transporting and processing substrates in substrate processing apparatus
DAINIPPON SCREEN MFG27 citations92
US6790286B2Sep 14, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG24 citations92
US6790287B2Sep 14, 2004
Substrate processing apparatus, substrate inspection method and substrate processing system
DAINIPPON SCREEN MFG26 citations92
US5687085ANov 11, 1997
Substrate processing apparatus and method
DAINIPPON SCREEN MFG31 citations92
US5668733ASep 16, 1997
Substrate processing apparatus and method
DAINIPPON SCREEN MFG54 citations92
US6837632B2Jan 4, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG30 citations90
US7317961B2Jan 8, 2008
Substrate processing apparatus and method of transporting substrates and method of processing substrates in substrate processing apparatus
DAINIPPON SCREEN MFG15 citations83
US7525650B2Apr 28, 2009
Substrate processing apparatus for performing photolithography
DAINIPPON SCREEN MFG19 citations82
US7128481B2Oct 31, 2006
Substrate processing apparatus for inspecting processing history data
DAINIPPON SCREEN MFG9 citations73
US6963789B2Nov 8, 2005
Substrate processing apparatus control system and substrate processing apparatus
DAINIPPON SCREEN MFG8 citations68
US7563323B2Jul 21, 2009
Substrate treating apparatus
DAINIPPON SCREEN MFG5 citations62
US7497912B2Mar 3, 2009
Substrate processing apparatus
DAINIPPON SCREEN MFG6 citations62
US7229240B2Jun 12, 2007
Substrate processing apparatus and substrate processing method
DAINIPPON SCREEN MFG2 citations62