Inventor
DEACON THOMAS E
US8 patents
Patents
8 patentsUS5792269AAug 11, 1998
Gas distribution for CVD systems
APPLIED MATERIALS INC164 citations98
US5194401AMar 16, 1993
Thermally processing semiconductor wafers at non-ambient pressures
APPLIED MATERIALS INC580 citations98
US5179677AJan 12, 1993
Apparatus and method for substrate heating utilizing various infrared means to achieve uniform intensity
APPLIED MATERIALS INC125 citations98
US4920918AMay 1, 1990
Pressure-resistant thermal reactor system for semiconductor processing
APPLIED MATERIALS INC416 citations98
US6476362B1Nov 5, 2002
Lamp array for thermal processing chamber
APPLIED MATERIALS INC63 citations95
US6149987ANov 21, 2000
Method for depositing low dielectric constant oxide films
APPLIED MATERIALS INC61 citations95
US6171966B1Jan 9, 2001
Delineation pattern for epitaxial depositions
APPLIED MATERIALS INC7 citations73
US6523494B1Feb 25, 2003
Apparatus for depositing low dielectric constant oxide film
APPLIED MATERIALS INC5 citations62