Inventor
KIBA YUKIO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KIBA YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS5939130AAug 17, 1999
Coating film forming method and coating film forming apparatus
TOKYO ELECTRON LTD84 citations94
US5866307AFeb 2, 1999
Resist processing method and resist processing system
TOKYO ELECTRON LTD34 citations91
US6217657B1Apr 17, 2001
Resist processing system having process solution deaeration mechanism
TOKYO ELECTRON LTD28 citations87
US7387455B2Jun 17, 2008
Substrate processing device, substrate processing method, and developing device
TOKYO ELECTRON LTD13 citations80