Inventor
INABA SHOICHI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “INABA SHOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
6 patentsUS6168684B1Jan 2, 2001
Wafer polishing apparatus and polishing method
NEC CORP46 citations90
US6231425B1May 15, 2001
Polishing apparatus and method
NEC CORP19 citations89
US6093080AJul 25, 2000
Polishing apparatus and method
NEC CORP44 citations89
US6234884B1May 22, 2001
Semiconductor wafer polishing device for removing a surface unevenness of a semiconductor substrate
NEC CORP7 citations72
US6139409AOct 31, 2000
Wafer polishing apparatus and backing pad for wafer polishing
NEC CORP12 citations72
US5641231AJun 24, 1997
Temperature monitoring apparatus equipped with gas chamber for converting temperature to gas pressure
NEC CORP4 citations61