Inventor

MULLER K PAUL L

US3 patents

Patents

3 patents

US6252284B1Jun 26, 2001

Planarized silicon fin device

IBM291 citations98

US6432829B2Aug 13, 2002

Process for making planarized silicon fin device

IBM76 citations95

US5312717AMay 17, 1994

Residue free vertical pattern transfer with top surface imaging resists

IBM78 citations95