Inventor
WU KUO-CHUN
US11 patents
⚠️ This page may combine multiple inventors who share the name “WU KUO-CHUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOSEL VITELIC INC
8 patentsUS7040958B2May 9, 2006
Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer
MOSEL VITELIC INC14 citations79
US6955987B2Oct 18, 2005
Comparison of chemical-mechanical polishing processes
MOSEL VITELIC INC7 citations72
US6500712B1Dec 31, 2002
Fabrication of dielectric in trenches formed in a semiconductor substrate for a nonvolatile memory
MOSEL VITELIC INC7 citations72
US6780086B2Aug 24, 2004
Determining an endpoint in a polishing process
MOSEL VITELIC INC4 citations61
US6531387B1Mar 11, 2003
Polishing of conductive layers in fabrication of integrated circuits
MOSEL VITELIC INC5 citations61
US7070484B2Jul 4, 2006
Pad break-in method for chemical mechanical polishing tool which polishes with ceria-based slurry
MOSEL VITELIC INC4 citations57
US6997788B2Feb 14, 2006
Multi-tool, multi-slurry chemical mechanical polishing
MOSEL VITELIC INC5 citations57
US6713782B2Mar 30, 2004
Polishing of conductive layers in fabrication of integrated circuits
MOSEL VITELIC INC1 citations51